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CVD graphene growth on Cu foil
Au/Cr electrode deposition
E-beam lithography (PMMA bilayer)
RCA clean (Si wafer)
ALD Al₂O₃ (30 nm)
Bosch etch (deep Si trench)
GFET Id-Vg measurement
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Thermal CVD furnace (graphene growth)
E-beam lithography system
E-beam evaporator (Au/Cr/Ti)
ALD system (Al₂O₃ / HfO₂)
RIE etcher (CF₄/O₂)
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Rapid thermal annealer
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Saved procedures
LPCVD Graphene Growth on Cu Foil
7 steps · seeded demo
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